The electronics world today is marked by the move to higher density semiconductor as well as bigger and higher resolution FPDs.

Plasma process are required to high repeatability , stability and sophisticated plasma control for manufacturing. Daihen has developed RF / MW power generator and match box for auto tuning by exploiting its many years of expertise in power electronics. We offer various solutions to meet any customer requirement in the future.

DAIHEN clean robot realized superior repeatabillity with high speed and precise handling in vacuum and atmospheric environment. Also, the robot can handle substarate without particles by optimized smooth motion, and the products reliability are exellent.