Products : DAIHEN Advanced Component, Inc.

RF/MW Components

RF Components: RF Generator; RF Match; RF Sensor
MW Components: MV Generator; MV Tuner

Clean Transfer Robots

For Vacuum Environment: Wafer Transfer; FPD Transfer
For Atmospheric Environment: Wafer Transfer; FPD Transfer

Products

RF/MW Components

Microwave/RF generators, matchers, and RF sensors which realized stable and homogeneous plasma, and damage free devices.

Clean Transfer Robots

DAIHEN has a wide lineup of robots for transferring wafers and FPDs in either atmospheric or vacuum environments. It has realized high speed and precise handling by optimized design.

RF Components: RF Generator; RF Match; RF Sensor

Vacuum Transfer Robot: Wafer Transfer; Flat Panel Display Transfer

MW Components: MW Generator; MW Match

Atmosphere Transfer Robot: Wafer Transer; Flat Panel Display Transfer

Contact Info

DAIHEN
Advanced Component, Inc.
3030 Olcott Street
Santa Clara, CA 95054

(408) 970-1450 phone
(408) 970-1455 fax
info@daihen-ac.com

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