DAIHEN's RF Automatic Matching Unit had developped for superior quality plasma generate, such as "Fine Plasma".
| Cooling Method | (RMN-10)W:280×D:400×H:160 (CMC-10)W:170×D:100×H:40 |
| Dimensions | (RMN-10)8kg (CMC-10)0.5kg |
| Frequency Range | 13.56MHz |
| Matching Accuracy | Within 0.5% (power ratio) *1 |
| Matching Speed | Within 1.5 s *1 |
| Max Allowable Power | 1000W |
| Cooling Method | Water-cooled, forced air-cooled |
| Dimensions | (RMN-30)W:280×D:420×H:165 (CMC-10/ACP-100)W:480×D:110×H:99 |
| Frequency Range | 13.56MHz |
| Mass | (RMN-30)11kg (CMC-10/ACP-100)3kg |
| Matching Accuracy | Within 0.5% (power ratio) *1 |
| Matching Speed | Within 3 s *1 |
| Max Allowable Power | 3000W |
| Cooling Method | Water-cooled, forced air-cooled |
| Dimensions | (AMN-50)W:410×D:388×H:174 (CMC-10/ACP-100)W:480×D:110×H:99 |
| Frequency Range | 60MHz |
| Mass | (AMN-50)25kg (CMC-10/ACP-100)3kg |
| Matching Accuracy | Within 1% (power ratio) *1 |
| Matching Speed | Within 3 s *1 |
| Max Allowable Power | 5000W |