DAIHEN RF Sensor "ViPHi" is the best signal monitoring tool for Plasma chamber analysis.
| Frequency Range | Variable frequencies ready 12MHz to 15MHz |
| Load Power of Accuracy | 5%(Γ<0.71)@13.56MHz |
| Max Current | 60 Arms |
| Max Voltage | 1000 Vrms |
| Phase of Accuracy | 0.3degree(Γ<0.8) |
| V,I Absolute of Accuracy | 1.0%(Γ=0),2.5%(Γ<0.9) |