LCD substrates handling robot (for vacuum environment)
| Ambient Temperature | VAC side: 15 to 70 deg. C ATM side: 15 to 35 deg. C |
| Cleanliness | ISO Class 4 |
| Configuration | 2-axes cylindrical coordinates system |
| Drooping | P to P 4 mm or lees (at 360 mm from the center of E/E attachment flange) |
| Mass | 35 kg |
| Operation Range | X-axis: 1080 mm θ-axis: 330 deg. |
| Operation Speed | X-axis: 2.0 sec/1080 mm θ-axis: 2.0 sec/180 deg. |
| Payload | 3 kg (including E/E) |
| Repeatability | XYZ directions: ±0.2 mm or lees (at 360 mm from the center of E/E attachment flange) |
| Trajectory | ±2.0 mm or lees (at 360 mm from the center of E/E attachment flange) |
| Vibration Resistance | 4.9 m/sec2 or less (0.5 G or less) |
| Withstand Vacuum | 1.3×10-6 Pa |
| Ambient Temperature | VAC side: 15 to 70 deg. C ATM side: 15 to 35 deg. C |
| Cleanliness | ISO Class 4 |
| Configuration | 3-axes cylindrical coordinates system |
| Drooping | P to P 4 mm or lees (at 360 mm from the center of E/E attachment flange) |
| Mass | 80 kg |
| Operation Range | X-axis: 1080 mm θ-axis: 330 deg. Z-axis: 45 mm |
| Operation Speed | X-axis: 1.8 sec/1080 mm θ-axis: 1.4 sec/180 deg. Z-axis: 0.9 sec/45 mm |
| Payload | 3 kg (including E/E) |
| Repeatability | XYZ directions: ±0.2 mm or lees (at 360 mm from the center of E/E attachment flange) |
| Trajectory | ±2.0 mm or lees (at 360 mm from the center of E/E attachment flange) |
| Vibration Resistance | 4.9 m/sec2 or less (0.5 G or less) |
| Withstand Vacuum | 1.3×10-6 Pa |
| Ambient Temperature | VAC side: 15 to 80 deg. C ATM side: 15 to 35 deg. C |
| Cleanliness | ISO Class 4 |
| Configuration | 4-axes cylindrical coordinates system |
| Drooping | P to P 12 mm or less (at 1800 mm from the center of E/E attachment flange) |
| Mass | 1100 kg |
| Operation Range | X1, X2-axes: 2621.4 mm θ-axis: 330 deg. Z-axis: 100 mm |
| Operation Speed | X1, X2-axes: 2.2 sec/2621.4 mm θ-axis: 2.6 sec/180 deg. Z-axis: 1.2 s/100 mm |
| Payload | 50 kg/arm (including E/E) |
| Repeatability | XYZ directions: ±0.5 mm or lees (at 1800 mm from the center of E/E attachment flange) |
| Trajectory | ±8.0 mm or lees (at 1800 mm from the center of E/E attachment flange) |
| Vibration Resistance | 4.9 m/sec2 or less (0.5 G or less) |
| Withstand Vacuum | 1.3×10-5 Pa |
| Ambient Temperature | VAC side: 15 to 80 deg. C ATM side: 15 to 35 deg. C |
| Cleanliness | ISO Class 4 |
| Configuration | 4 axes cylindrical coordinates system |
| Drooping | P to P 32 mm or less (at 1800 mm from the center of E/E attachment flange) |
| Mass | 3000 kg |
| Operation Range | X1, X2-axes: 3046.7 mm θ-axis: 330 deg. Z-axis: 150 mm |
| Operation Speed | X1, X2-axes: 4.0 sec/3046.7 mm θ-axis: 3.2 sec/180 deg. Z-axis: 2.3 sec/100mm |
| Payload | 153 kg/arm (including E/E) |
| Repeatability | ±0.5 mm or less (at 1800 mm from the center of E/E attachment flange) |
| Trajectory | ±16 mm or less (at 1800 mm from the center of E/E attachment flange) |
| Vibration Resistance | 4.9 m/sec2 or less (0.5G or less) |
| Withstand Vacuum | 1.3x10-6 Pa |
| Ambient Temperature | ATM side: 15 to 35 deg. C VAC side: 15 to 80 deg. C |
| Cleanliness | ISO Class 4 |
| Configuration | 3 axes cylindrical coordinates system |
| Drooping | P to P 8.0 mm or less (at 720 mm from the center of E/E attachement flange) |
| Mass | 900 kg |
| Operation Range | X-axis: 1896 mm θ-axis: 330 deg. Z-axis: 100 mm |
| Operation Speed | X-axis: 2.1 sec/1896 mm θ-axis: 2.7 sec/180 deg. Z-axis: 1.2 sec/100 mm |
| Payload | 50 kg (including E/E) |
| Repeatability | XYZ directions: ±0.3 mm or less (at 720 mm from the center of E/E attachment flange) |
| Trajectory | ±5.0 mm or less (at 720 mm from the center of E/E attachment flange) |
| Vibration Resistance | 4.9 m/sec2 or less (0.5 G or less) |
| Withstand Vacuum | 1x10-6 Pa |
| Ambient Temperature | ATM side: 15 to 35 deg. C VAC side: 15 to 80 deg. C |
| Cleanliness | ISO Class 4 |
| Configuration | 2 axes cylindrical coordinates system |
| Drooping | P to P 32 mm or less (at 2800 mm from the center of E/E attachement flange) |
| Mass | 1300 kg |
| Operation Range | X-axis: 3291 mm θ-axis: 330 deg. |
| Operation Speed | X-axis: 3.4 sec/3291 mm θ-axis: 3.7 sec/180 deg. |
| Payload | 153 kg (including E/E) |
| Repeatability | XYZ directions: ±0.5 mm or less (at 2800 mm from the center of E/E attachment flange) |
| Trajectory | ±16.0 mm or less (at 2800 mm from the center of E/E attachment flange) |
| Vibration Resistance | 4.9 m/sec2 or less (0.5 G or less) |
| Withstand Vacuum | 1.3x10-5 Pa |
| Ambient Temperature | ATM side: 15 to 35 deg. C VAC side: 15 to 70 deg. C |
| Cleanliness | ISO Class 4 |
| Configuration | 4 axes cylindrical coordinates system |
| Drooping | P to P 24 mm or less (at 1500 mm from the center of E/E attachement flange) |
| Mass | 1200 kg |
| Operation Range | X1, X2-axes: 2924 mm θ-axis: 330 deg. Z-axis: 150 mm |
| Operation Speed | X1, X2--axes: 3.2 sec/2924 mm θ-axis: 3.1 sec/180 deg. Z-axis: 2.6 sec/150 mm |
| Payload | 70 kg /arm (including E/E) |
| Repeatability | XYZ directions: ±0.5 mm or less (at 1500 mm from the center of E/E attachment flange) |
| Trajectory | ±12.0 mm or less (at 1500 mm from the center of E/E attachment flange) |
| Vibration Resistance | 4.9 m/sec2 or less (0.5 G or less) |
| Withstand Vacuum | 1.3x10-5 Pa |
| Ambient Temperature | ATM side: 15 to 35 deg. C VAC side: 15 to 80 deg. C |
| Cleanliness | ISO Class 4 |
| Configuration | 4 axes cylindrical coordinates system |
| Drooping | P to P 8 mm or less (at 2300 mm from the center of E/E attachement flange) |
| Mass | 2350 kg |
| Operation Range | X1, X2-axes: 2522.8 mm θ-axis: Continuous Z-axis: 600 mm |
| Operation Speed | X1, X2--axes: 2.6 sec/2522.8 mm θ-axis: 2.5 sec/180 deg. Z-axis: 2.0 sec/600 mm |
| Payload | 45 kg/arm (including E/E) |
| Repeatability | XYZ directions: ±0.5 mm or less (at 2300 mm from the center of E/E attachment flange) |
| Trajectory | ±8.0 mm or less (at 2300 mm from the center of E/E attachment flange) |
| Vibration Resistance | 4.9 m/sec2 or less (0.5 G or less) |
| Withstand Vacuum | 1.3x10-5 Pa |
| Ambient Temperature | ATM side: 15 to 50 deg. C VAC side: 15 to 150 deg. C |
| Cleanliness | ISO Class 4 |
| Configuration | 4 axes cylindrical coordinates system |
| Drooping | P to P 15 mm or less (at 3600 mm from the center of E/E attachement flange) |
| Mass | 5000 kg |
| Operation Range | X1, X2-axes: 3860 mm θ-axis: Continuous Z-axis: 1045 mm |
| Operation Speed | X1, X2--axes: 3.8 sec/3860 mm θ-axis: 4.6 sec/180 deg. Z-axis: 3.3 sec/1045 mm |
| Payload | 300 kg /arm (including E/E) |
| Repeatability | XY directions: ±1.0 mm or less Z direction: ±0.5 mm or less (at 3600 mm from the center of E/E attachment flange) |
| Trajectory | ±5.0 mm or less (at 3600 mm from the center of E/E attachment flange) |
| Vibration Resistance | 4.9 m/sec2 or less (0.5 G or less) |
| Withstand Vacuum | 1.3x10-5 Pa |
| Ambient Temperature | ATM side: 15 to 80 deg. C VAC side: 20 to 160 deg. C |
| Cleanliness | ISO Class 4 |
| Configuration | 4 axes cylindrical coordinates system |
| Drooping | P to P 12 mm or less (at 3400 mm from the center of E/E attachement flange) |
| Mass | 3800 kg |
| Operation Range | X1, X2-axes: 3650 mm θ-axis: 340 deg. Z-axis: 540 mm |
| Operation Speed | X1, X2--axes: 2.4 sec/3650 mm θ-axis: 2.4 sec/180 deg. Z-axis: 1.8 sec/540 mm |
| Payload | X1-axis: 120 kg (including E/E) X2-axis: 180 kg (including E/E) |
| Repeatability | XY directions: ±1.0 mm or less Z direction: ±0.5 mm or less (at 3400 mm from the center of E/E attachment flange) |
| Trajectory | ±5.0 mm or less (at 3400 mm from the center of E/E attachment flange) |
| Vibration Resistance | 4.9 m/sec2 or less (0.5 G or less) |
| Withstand Vacuum | 1.3x10-5 Pa |
| Ambient Temperature | ATM side: 15 to 80 deg. C VAC side: 20 to 160 deg. C |
| Cleanliness | ISO Class 4 |
| Configuration | 4 axes cylindrical coordinates system |
| Drooping | P to P 10 mm or less (at 2900 mm from the center of E/E attachement flange) |
| Mass | 2650 kg |
| Operation Range | X1, X2-axes: 3250 mm θ-axis: 340 deg. Z-axis: 820 mm |
| Operation Speed | X1, X2--axes: 2.4 sec/3250 mm θ-axis: 3.1 sec/180 deg. Z-axis: 2.2 sec/820 mm |
| Payload | X1-axis: 80 kg (including E/E) X2-axis: 120 kg (including E/E) |
| Repeatability | XY directions: ±1.0 mm or less Z direction: ±0.5 mm or less (at 2900 mm from the center of E/E attachment flange) |
| Trajectory | ±5.0 mm or less (at 2900 mm from the center of E/E attachment flange) |
| Vibration Resistance | 4.9 m/sec2 or less (0.5 G or less) |
| Withstand Vacuum | 1.3x10-5 Pa |
| Ambient Temperature | ATM side: 15 to 80 deg. C VAC side: 20 to 160 deg. C |
| Cleanliness | ISO Class 4 |
| Configuration | 4 axes cylindrical coordinates system |
| Drooping | P to P 10 mm or less (at 2300 mm from the center of E/E attachement flange) |
| Mass | 2350 kg |
| Operation Range | X1, X2-axes: 2320 mm θ-axis: 340 deg. Z-axis: 610 mm |
| Operation Speed | X1, X2--axes: 2.3 sec/2320 mm θ-axis: 2.5 sec/180 deg. Z-axis: 1.8 sec/610 mm |
| Payload | X1-axis: 70 kg (including E/E) X2-axis: 110 kg (including E/E) |
| Repeatability | XY directions: ±1.0 mm or less Z direction: ±0.5 mm or less (at 2300 mm from the center of E/E attachment flange) |
| Trajectory | ±5.0 mm or less (at 2300 mm from the center of E/E attachment flange) |
| Vibration Resistance | 4.9 m/sec2 or less (0.5 G or less) |
| Withstand Vacuum | 1.3x10-5 Pa |
| Ambient Temperature | ATM side: 15 to 35 deg. C VAC side: 15 to 70 deg. C |
| Cleanliness | ISO Class 4 |
| Configuration | 3 axes cylindrical coordinate system |
| Drooping | P to P 6.0 mm or less (at 500 mm from the center of E/E attachement flange) |
| Mass | 300 kg |
| Operation Range | X-axis: 1500 mm θ-axis: 330 deg. Z-axis: 80 mm |
| Operation Speed | X-axis: 3.2 sec/1500 mm θ-axis: 2.5 sec/180 deg. Z-axis: 1.8 sec/80 mm |
| Payload | 15 kg (including E/E) |
| Repeatability | XYZ directions: ±0.2 mm or less (at 500 mm from the center of E/E attachment flange) |
| Trajectory | ±3.0 mm or less (at 500 mm from the center of E/E attachment flange) |
| Vibration Resistance | 4.9 m/sec2 or less (0.5 G or less) |
| Withstand Vacuum | 1x10-6 Pa |
| Ambient Temperature | ATM side: 15 to 35 deg. C VAC side: 15 to 70 deg. C |
| Cleanliness | ISO Class 4 |
| Configuration | 2 axes cylindrical coordinate system |
| Drooping | P to P 6.0 mm or less (at 580 mm from the center of E/E attachement flange) |
| Mass | 120 kg |
| Operation Range | X-axis: 1740 mm θ-axis: 330 deg. |
| Operation Speed | X-axis: 2.4 sec/1740 mm θ-axis: 2.1 sec/180 deg. |
| Payload | 15 kg (including E/E) |
| Repeatability | XYZ directions: ±0.2 mm or less (at 580 mm from the center of E/E attachment flange) |
| Trajectory | ±3.0 mm or less (at 580 mm from the center of E/E attachment flange) |
| Vibration Resistance | 4.9 m/sec2 or less (0.5 G or less) |
| Withstand Vacuum | 1x10-6 Pa |
| Ambient Temperature | ATM side: 15 to 35 deg. C VAC side: 15 to 80 deg. C |
| Cleanliness | ISO Class 4 |
| Configuration | 3 axes cylindrical coordinate system |
| Drooping | P to P 43 mm or less (at 2800 mm from the center of E/E attachement flange) |
| Mass | 1980 kg |
| Operation Range | X-axis: 2800 mm θ-axis: Continuous Z-axis: 400 mm |
| Operation Speed | X-axis: 3.5 sec/2800 mm θ-axis: 3.0 sec/180 deg. Z-axis: 4.0 sec/400 mm |
| Payload | 90 kg (including E/E) |
| Repeatability | XYZ directions: ±0.5 mm or less (at 2800 mm from the center of E/E attachment flange) |
| Trajectory | ±12.0 mm or less (at 2800 mm from the center of E/E attachment flange) |
| Vibration Resistance | 4.9 m/sec2 or less (0.5 G or less) |
| Withstand Vacuum | 1.3x10-5 Pa |
| Ambient Temperature | ATM side: 15 to 35 deg. C VAC side: 15 to 70 deg. C |
| Cleanliness | ISO Class 4 |
| Configuration | 2 axes cylindrical coordinate system |
| Drooping | P to P 6.0 mm or less (at 500 mm from the center of E/E attachement flange) |
| Mass | 110 kg |
| Operation Range | X-axis: 1500 mm θ-axis: 330 deg. |
| Operation Speed | X-axis: 2.9 sec/1500 mm θ-axis: 2.6 sec/180 deg. |
| Payload | 10 kg (including E/E) |
| Repeatability | XYZ directions: ±0.3 mm or less (at 500 mm from the center of E/E attachment flange) |
| Trajectory | ±2.0 mm or less (at 500 mm from the center of E/E attachment flange) |
| Vibration Resistance | 4.9 m/sec2 or less (0.5 G or less) |
| Withstand Vacuum | 1x10-6 Pa |