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RF/MW Components
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Microwave/RF generators, matchers, and RF sensors which realized stable and homogeneous plasma, and damage free devices.
RF/MW Diagram
[ Production Results Under Development ]
Frequency /
Developed power		1kW2kW3kW5kW~15kW~30kW~40kW 60kW~
Power 400kHz~2MHz
13.56MHz
27~60MHz
100~500MHz
2.45Ghz
Auto
matching
box		 400kHz~2MHz
13.56MHz
27~60MHz
100~500MHz
2.45GHz
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Contact Info
DAIHEN
Advanced Component, Inc.
1223 East Arques Avenue,
Sunnyvale, CA 94085 US

Tel: (408) 736-2000
Fax: (408) 736-2010
info@daihen-ac.com
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