RF Generator : DAIHEN Advanced Component, Inc.

RF/MW Components

RF Components: RF Generator; RF Match; RF Sensor
MW Components: MW Generator; MW Tuner

Clean Transfer Robots

For Vacuum Transfer Environment: Wafer Transfer; FPD Transfer
For Atmospheric Environment: Wafer Transfer; FPD Transfer

RF Generator

DAIHEN's RF Generators had developed for superior quality plasma generate, such as "Fine Plasma".

RF Generator for Plasma Application <RGA-50>


Output Frequency	13.56MHz
Output Frequency Stability	Within ±0.01%
Output Impedance	50Ω
Rated Power	5kW
Cooling Method	Water-cooled, forced air-cooled
Dimensions	W:430×D:600×H:244mm
Mass	65kg
Output Stability	Within ±1% of setting output

RF Generator for Plasma Application <MGA-20/WGA-20, 30, 50>


Output Frequency	400KHz(MGA-20)/2MHz(WGA-20)/(WGA-30)/(WGA-50)
Output Frequency Stability	Within ±0.01%
Output Impedance	50Ω
Rated Power	2kW、3kW、5kW
Cooling Method	Forced air-cooled
Dimensions	W:430×D:570×H:199(2kW)、385(3kW)、399(5kW)mm
Mass	27kg(2kW)、55kg(3kW)、60kg(5kW)
Output Stability	Within ±1% of setting output

- Compact lightweight unit that incorporates a high efficiency Class D amplifier and DC-DC converter.
- Constant progressive wave output voltage maintained by a good power feedback circuit.
- Protected against trouble including output terminal open circuits and shorts.

RF Generator <RGA-600>


Output Frequency	13MHz Range
Output Frequency Stability	±0.02%
Output Impedance	50±2Ω
Rated Power	60kW
Cooling Method	Forced air-cooled, Water cooled
Dimensions	W:700×D:1000×H:1310mm
Mass	384kg
Output Stability	Within ±2% of setting output

Contact Info

DAIHEN
Advanced Component, Inc.
3030 Olcott Street
Santa Clara, CA 95054

(408) 970-1450 phone
(408) 970-1455 fax
info@daihen-ac.com