DAIHEN RF Sensor "ViPHi" is the best signal monitoring tool for Plasma chamber analysis.
| Frequency range | 12MHz to 15MHz |
| Max Voltage | 1000 Vrms |
| Max Current | 60 Arms |
| Phase of accuracy | 0.3degree(Γ<0.8) |
| Load power of accuracy | 5%(Γ<0.7)@13.56MHz |
| V,I absolute of accuracy | 1.0%(Γ=0),2.5%(Γ<0.9) |
| Frequency type | Variable frequencies ready |