RF/MW Components : DAIHEN Advanced Component, Inc.

RF/MW Components

RF Components: RF Generator; RF Match; RF Sensor
MW Components: MW Generator; MW Tuner

Clean Transfer Robots

For Vacuum Environment: Wafer Transfer; FPD Transfer
For Atmospheric Environment: Wafer Transfer; FPD Transfer

RF/MW Components

Microwave/RF generators, matchers, and RF sensors which realized stable and homogeneous plasma, and damage free devices.

RF/MW Diagram

[ Production Results Under Development ]

	Frequency / Developed power	1kW	2kW	3kW	5kW	~15kW	~30kW	~40kW	60kW~
Power	400kHz~2MHz
	13.56MHz
	27~60MHz
	100~500MHz
	2.45Ghz
Auto matching box	400kHz~2MHz
	13.56MHz
	27~60MHz
	100~500MHz
	2.45GHz

Contact Info

DAIHEN
Advanced Component, Inc.
3030 Olcott Street
Santa Clara, CA 95054

(408) 970-1450 phone
(408) 970-1455 fax
info@daihen-ac.com

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