Clean Transfer Robots : DAIHEN Advanced Component, Inc.

RF/MW Components

RF Components: RF Generator; RF Match; RF Sensor
MW Components: MV Generator; MV Tuner

Clean Transfer Robots

For Vacuum Environment: Wafer Transfer; FPD Transfer
For Atmospheric Environment: Wafer Transfer; FPD Transfer

Clean Transfer Robots

DAIHEN clean robot realized superior repeatabillity with high speed and precise handling in vacuum and atmospheric environment. Also, the robot can handle substarate without particles by optimized smooth motion, and the products reliability are exellent.

For Vaccuum Environment

[ Available Under Development See Spec ]

ACT	Substrate Size	Single Arm		Dual Arm
ACT	Substrate Size	2axis(X,θ)	2axis(X,θ,Z)	3axis(X2,θ) 4axis(X2,θ,Z)
Wafer	ø200mm	SPR-301S	SPR-311S
	ø300mm	SPR-3002	SPR-3003	SPR-3504
	ø450mm
FPD	2G	SPR-801S	SPR-804S
	3G	SPR-802S SPR-805S SPR-807S
	3.5G	SPR-806S
	4G	SPR-811S	SPR-8106S	SPR-8503
	5G		SPR-8109	SPR-8501S
	5.5G			SPR-8508
	6G			SPR-8504
	7G			SPR-8504
	8G			SPR-8508
	10G-
OLED	2G		SPR-8106S SPR-8109	SPR-8503
	3G
	3.5G			SPR-8508
	4G

For Atmospheric Environment

[ Abailable Under Development See Spec ]

ACT	Substrate Size	Single Arm	Dual Arm
ACT	Substrate Size	3axis(X,θ,Z) 4axis(X2,θ,Z2)	4axis(X2,θ,Z) 5axis(X2,θ,Z2)
Wafer	ø200mm		SPR-1502
	ø300mm	SPR-111S	SPR-1502
	ø450mm
FPD	2G	SPR-902S	SPR-951S
	3G	SPR-906S
	3.5G
	4G	SPR-9019	SPR-9519
	5G		SPR-9517
	5.5G		SPR-9518
	6G		SPR-9518

Contact Info

DAIHEN
Advanced Component, Inc.
3030 Olcott Street
Santa Clara, CA 95054

(408) 970-1450 phone
(408) 970-1455 fax
info@daihen-ac.com

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