High payload model for wafers up to 300mm
Standard model which is available for high payload and extensive movement
For wafers up to 300mm Standard model
Standard model with power line communication technology
For wafers up to 300mm Water proof model
Water proof model
with protection class IP64
For wafers up to 300mm
For wafers up to 200mm
For wafers up to 300mm, payload 2kg
For wafers up to 300mm
High-precision vacuum robot for single arm type equipped with a direct drive motor to significantly reduce vibration
For wafers up to 300mm
High-speed, low vibration double-arm vacuum robot that achieves to a significant improvement in equipment throughput by 650wph of ultra high-speed.
For wafers up to 300mm
Vacuum robot for single arm type that arm length and z stroke is selectable