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Clean Transfer Robots

Wafer Transfer Robot

ACTRANS UT-AFX/W3000NM
UTX/W-RF5500RW
ACTRANS UTM-R3700F
ACTRANS UTX-RF5500RP
ACTRANS UTW-REH5500
ACTRANS UTC-R800
ACTRANS UTPX-R5500
UTV-RS2600W series
UTV-R2700H series
UTVW-R2800H

Wafer Aligner

AIGIS2 OFH-4100i2
EG-303 series
ACTRANS OFH-4100 series
AIGIS-OFH-4100i

EFEM

Ophiuchus OPS-2300 series
Ophiuchus OPS-3100 series

FPD Transfer Robot

SPR-AD008BTN-154/034 (ETO products)
SPR-AD008BTN-154/080 (ETO products)
SPR-801R
SPR-804R
SPR-811R
SPR-8565
SPR-8566
SPR-8508R
SPR-8571
SPR-8572
SPR-8573

Vertical Articulated Robot

FDCL-V4MN

Check Out Our Products in Action

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