Clean Transfer Robots

EFEM

Ophiuchus OPS-2300 series

EFEM

Compact 2 port EFEM

Features

  • Robot equipped with access to 2 FOUP realizes Y-axisless
  • Cooperative control of robot and aligner simplifies aligner and achieves cost reduction

Ophiuchus OPS-3100 series

EFEM

High speed, compact 3 port EFEM

Features

  • Maximize the potential of connected devices with high throughput of 300 WPH
  • Contributing to space saving of production line with a compact case

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