Clean Transfer Robots
EFEM
Ophiuchus OPS-2300 series
EFEM
Compact 2 port EFEM
Features
- Robot equipped with access to 2 FOUP realizes Y-axisless
- Cooperative control of robot and aligner simplifies aligner and achieves cost reduction
Ophiuchus OPS-3100 series
EFEM
High speed, compact 3 port EFEM
Features
- Maximize the potential of connected devices with high throughput of 300 WPH
- Contributing to space saving of production line with a compact case
