Products
RF/MW Generators
Clean Transfer Robots
About Us
Contact Us
Menu
Products
RF/MW Generators
Clean Transfer Robots
About Us
Contact Us
Download Catalog
Clean Transfer Robots
EFEM
Ophiuchus OPS-2300 series
EFEM
Compact 2 port EFEM
Features
Robot equipped with access to 2 FOUP realizes Y-axisless
Cooperative control of robot and aligner simplifies aligner and achieves cost reduction
Specifications
Ophiuchus OPS-3100 series
EFEM
High speed, compact 3 port EFEM
Features
Maximize the potential of connected devices with high throughput of 300 WPH
Contributing to space saving of production line with a compact case
Specifications
Check Out Our Products in Action
Vist YouTube