Clean Transfer Robots

FPD Transfer Robot
[for FOPLP]

SPR-AD008BTN-154/034 (ETO products)

Payload 8kg

Double arm robot for FOPLP

Features

SPR-AD008BTN-154/080 (ETO products)

Payload 8kg

Double arm robot for FOPLP

Features

FPD Transfer Robot
[for vacuum environment]

SPR-801R (ETO products)

Payload 3kg

Single arm vacuum robot for Gen 3 panel

Features

SPR-804R (ETO products)

Payload 3kg

Single arm vacuum robot with Z-axis for Gen 3 panel

Features

SPR-811R (ETO products)

Payload 15kg

Single arm vacuum robot Gen 4.5 panel

Features

SPR-8565 (ETO products)

Payload 35kg

Double arm vacuum robot with Z-axis Gen 4.5 panel

Features

SPR-8566 (ETO products)

Payload 50kg

Double arm vacuum robot with Z-axis Gen 5 panel

Features

SPR-8508R (ETO products)

Payload 70kg

Double arm vacuum robot with Z-axis Gen 5.5 panel

Features

SPR-8571 (ETO products)

Payload 85kg

Double arm vacuum robot with Z-axis Gen 6 panel

Features

SPR-8572 (ETO products)

Payload 85kg

Double arm vacuum robot with Z-axis Gen 6 panel

Features

SPR-8573 (ETO products)

Payload 120kg

Double arm vacuum robot with Z-axis Gen 6 panel

Features

Check Out Our Products in Action