Clean Transfer Robots

FPD Transfer Robot
[for FOPLP]

SPR-AD008BTN-154/034 (ETO products)

Payload 8kg

Double arm robot for FOPLP

Features

  • Double arm robot for FOPLP
  • Telescopic Z-axis. Stroke : 800mm

SPR-AD008BTN-154/080 (ETO products)

Payload 8kg

Double arm robot for FOPLP

Features

  • Double arm robot for FOPLP
  • Telescopic Z-axis. Stroke : 800mm

FPD Transfer Robot
[for vacuum environment]

SPR-801R (ETO products)

Payload 3kg

Single arm vacuum robot for Gen 3 panel

Features

  • Single arm robot for Gen 2 panel
  • Equipped with magnetic fluid seal for high temperature vacuum environment
  • SPR-804R model without Z-axis

SPR-804R (ETO products)

Payload 3kg

Single arm vacuum robot with Z-axis for Gen 3 panel

Features

  • Single arm robot for Gen 2 panel
  • Equipped with magnetic fluid seal for high temperature vacuum environment
  • SPR-801R model with Z-axis

SPR-811R (ETO products)

Payload 15kg

Single arm vacuum robot Gen 4.5 panel

Features

  • Single arm robot for Gen 4.5 panel
  • Equipped with magnetic fluid seal for high temperature vacuum environment
  • Similar model : SPR-8565(with Z-axis/double arm)

SPR-8565 (ETO products)

Payload 35kg

Double arm vacuum robot with Z-axis Gen 4.5 panel

Features

  • Double arm robot for Gen 4.5 panel
  • Equipped with magnetic fluid seal for high temperature vacuum environment
  • Similar model : SPR-811R(without Z-axis)

SPR-8566 (ETO products)

Payload 50kg

Double arm vacuum robot with Z-axis Gen 5 panel

Features

  • Double arm robot for FOPLP
  • Telescopic Z-axis. Stroke : 800mm

SPR-8508R (ETO products)

Payload 70kg

Double arm vacuum robot with Z-axis Gen 5.5 panel

Features

  • Double arm robot for Gen 5.5 panel
  • Supports the transport of heavy objects such as masks

SPR-8571 (ETO products)

Payload 85kg

Double arm vacuum robot with Z-axis Gen 6 panel

Features

  • Double arm robot for Gen 6 panel
  • X-axis link arm type model
  • Similar model : SPR-8572(X-axis liner slider type) / SPR-8573(X-axis liner slide type/with cooling unit)

SPR-8572 (ETO products)

Payload 85kg

Double arm vacuum robot with Z-axis Gen 6 panel

Features

  • Double arm robot for Gen 6 panel
  • X-axis liner slider type model
  • Similar model : SPR-8571(X-axis link arm type) / SPR-8573(X-axis liner slide type/with cooling unit)

SPR-8573 (ETO products)

Payload 120kg

Double arm vacuum robot with Z-axis Gen 6 panel

Features

  • Double arm robot for Gen 6 panel
  • Supports high temperature environment with original cooling unit
  • Similar model : SPR-8571(X-axis link arm type) / SPR-8572(X-axis liner slide type/without cooling unit)

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