Clean Transfer Robots

Wafer Aligner

AIGIS2 OFH-4100i2

For 200-300mm wafers

Further evolved aligner with defect detection

Features

EG-303 series

For 300mm wafers

Features

ACTRANS OFH-4100 series

For wafers up to 50-300mm

Features

AIGIS OFH-4100i series

For wafers up to 100-300mm

Features

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