Clean Transfer Robots
Wafer Transfer Robot
[Atmospheric Environment]
ACTRANS UT-AFX/W3000NM
For wafers up to 300mm Standard model
Standard model with power line communication technology
Features
- Standard model with power line communication technology
- Various options are available
UTX/W-RF5500RW
For wafers up to 300mm Water proof model
Water proof model
with protection class IP64
Features
- IP64 water/dust proof
- Wafer flip axis
ACTRANS UTM-R3700F
For wafers up to 300mm
Features
- Wide operating range
- Small footprint
- High speed
ACTRANS UTX-RF5500RP
For wafers up to 300mm Bernoulli model
Convey of thin wafers
Features
- Coveyance of thin wafer up to 50µm
ACTRANS UTC-R800
For wafers up to 200mm
Features
- A reprint of the old MECS company UTC-800
- 70% reduction in power consumption
- Newly equipped with a teach pendant
ACTRANS UTPX-R5500
For mask substrate Low pass line model
Low pass line robot
with mast type Z-axis
Features
- Mast type Z-axis realized low pass line
- High payload handling capability such as the mask
Wafer Transfer Robot
[Vacuum Environment]
UTV-RS2600W series
For wafers up to 300mm
Features
- Standard double arm vacuum robot with many adoption results
UTV-R2700H series
For wafers up to 300mm
Features
- Standard compatible with 3 types of arm length, with or without Z-axis selectable, compatible with various device layouts
UTVW-R2800H
For wafers up to 300mm, payload 2kg
Features
- A DD motor is adopted for the turning shaft, enabling high-precision operation
- With a 2 kg payload, it can also handle heavy loads
