For wafers up to 300mm Standard model
Standard model with power line communication technology
For wafers up to 300mm Water proof model
Water proof model
with protection class IP64
For wafers up to 300mm
For wafers up to 300mm Bernoulli model
Convey of thin wafers
For wafers up to 200mm
For mask substrate Low pass line model
Low pass line robot
with mast type Z-axis
For wafers up to 300mm
For wafers up to 300mm
For wafers up to 300mm, payload 2kg