Clean Transfer Robots

Wafer Transfer Robot
[Atmospheric Environment]

ACTRANS UT-AFX/W3000NM

For wafers up to 300mm Standard model

Standard model with power line communication technology

Features

  • Standard model with power line communication technology
  • Various options are available

UTX/W-RF5500RW

For wafers up to 300mm Water proof model

Water proof model 
with protection class IP64

Features

  • IP64 water/dust proof
  • Wafer flip axis

ACTRANS UTM-R3700F

For wafers up to 300mm

Features

  • Wide operating range
  • Small footprint
  • High speed

ACTRANS UTX-RF5500RP

For wafers up to 300mm Bernoulli model

Convey of thin wafers

Features

  • Coveyance of thin wafer up to 50µm

ACTRANS UTW-REH5500

For wafers up to 300mm

Features

  • High-speed transport of 450 WPH

ACTRANS UTC-R800

For wafers up to 200mm

Features

  • A reprint of the old MECS company UTC-800
  • 70% reduction in power consumption
  • Newly equipped with a teach pendant

ACTRANS UTPX-R5500

For mask substrate Low pass line model

Low pass line robot 
with mast type Z-axis

Features

  • Mast type Z-axis realized low pass line
  • High payload handling capability such as the mask

Wafer Transfer Robot
[Vacuum Environment]

UTV-RS2600W series

For wafers up to 300mm

Features

  • Standard double arm vacuum robot with many adoption results

UTV-R2700H series

For wafers up to 300mm

Features

  • Standard compatible with 3 types of arm length, with or without Z-axis selectable, compatible with various device layouts

UTVW-R2800H

For wafers up to 300mm, payload 2kg

Features

  • A DD motor is adopted for the turning shaft, enabling high-precision operation
  • With a 2 kg payload, it can also handle heavy loads

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