Clean Transfer Robots

Wafer Transfer Robot
[Atmospheric Environment]

ACTRANS UT-AFX/W3000NM

For wafers up to 300mm Standard model

Standard model with power line communication technology

Features

UTX/W-RF5500RW

For wafers up to 300mm Water proof model

Water proof model 
with protection class IP64

Features

ACTRANS UTM-R3700F

For wafers up to 300mm

Features

ACTRANS UTX-RF5500RP

For wafers up to 300mm Bernoulli model

Convey of thin wafers

Features

ACTRANS UTW-REH5500

For wafers up to 300mm

Features

ACTRANS UTC-R800

For wafers up to 200mm

Features

ACTRANS UTPX-R5500

For mask substrate Low pass line model

Low pass line robot 
with mast type Z-axis

Features

Wafer Transfer Robot
[Vacuum Environment]

UTV-RS2600W series

For wafers up to 300mm

Features

UTV-R2700H series

For wafers up to 300mm

Features

UTVW-R2800H

For wafers up to 300mm, payload 2kg

Features

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